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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 28 January 2017)] MOEMS and Miniaturized Systems XVI - A contribution to the expansion of the applicability of electrostatic forces in micro transducers

Piyawattanametha, Wibool, Park, Yong-Hwa, Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus
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Volume:
10116
Year:
2017
Language:
english
DOI:
10.1117/12.2249575
File:
PDF, 772 KB
english, 2017
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