ALD preparation of high-k HfO 2 thin films with enhanced energy density and efficient electrostatic energy storage
Zhang, Le, Liu, Ming, Ren, Wei, Zhou, Ziyao, Dong, Guohua, Zhang, Yijun, Peng, Bin, Hao, Xihong, Wang, Chenying, Jiang, Zhuang-De, Jing, Weixuan, Ye, Zuo-GuangVolume:
7
Year:
2017
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/c6ra27847g
File:
PDF, 988 KB
english, 2017