Low-power catalytic gas sensing using highly stable silicon carbide microheaters
Harley-Trochimczyk, Anna, Rao, Ameya, Long, Hu, Zettl, Alex, Carraro, Carlo, Maboudian, RoyaVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa5d70
Date:
April, 2017
File:
PDF, 1.81 MB
english, 2017