[IEEE 2016 IEEE International Reliability Physics Symposium (IRPS) - Pasadena, CA, USA (2016.4.17-2016.4.21)] 2016 IEEE International Reliability Physics Symposium (IRPS) - Impact of trap creation at SiO2/Poly-Si interface on ultra-thin SiO2 reliability
Mitani, Y., Suzuki, M., Higashi, Y., Takaishi, R.Year:
2016
Language:
english
DOI:
10.1109/irps.2016.7574595
File:
PDF, 814 KB
english, 2016