Cathode sputtering of niobium and its alloys in a helium...

Cathode sputtering of niobium and its alloys in a helium glow discharge

D. M. Skorov, B. A. Kalin, V. B. Volkov, P. I. Kartsev, N. M. Kirilin
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Volume:
38
Language:
english
Pages:
2
DOI:
10.1007/bf01130955
Date:
May, 1975
File:
PDF, 267 KB
english, 1975
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