UV-enhanced atomic layer deposition of Al 2 O 3 thin films at low temperature for gas-diffusion barriers
Yoon, Kwan Hyuck, Kim, Hongbum, Koo Lee, Yong-Eun, Shrestha, Nabeen K., Sung, Myung MoVolume:
7
Year:
2017
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/c6ra27759d
File:
PDF, 1.02 MB
english, 2017