A modular reactor design for in situ synchrotron x-ray...

Review of Scientific Instruments 2015 / 11 Vol. 86; Iss. 11

A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., Proslier, Thomas
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Volume:
86
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4934807
Date:
November, 2015
File:
PDF, 6.62 MB
english, 2015
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