Characterization and prevention of humidity related...

Journal of Applied Physics 2017 / 01 Vol. 121; Iss. 2

Characterization and prevention of humidity related degradation of atomic layer deposited Al 2 O 3

Rückerl, Andreas, Zeisel, Roland, Mandl, Martin, Costina, Ioan, Schroeder, Thomas, Zoellner, Marvin H.
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Volume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4973583
Date:
January, 2017
File:
PDF, 2.33 MB
english, 2017
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