On the E-H transition in inductively coupled radio...

Plasma Sources Science and Technology 2017 / 01 Vol. 26; Iss. 2

On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen

Wegner, Th, Küllig, C, Meichsner, J
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Volume:
26
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/26/2/025006
Date:
January, 2017
File:
PDF, 1.04 MB
english, 2017
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