Effect of scan speed on moisture barrier properties of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

Effect of scan speed on moisture barrier properties of aluminum oxide using spatial atomic layer deposition

Shin, Seokyoon, Choi, Hagyoung, Ham, Giyul, Park, Joohyun, Lee, Juhyun, Choi, Hyeongsu, Lee, Seungjin, Kim, Hyunjung, Jeon, Hyeongtag
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4976508
Date:
March, 2017
File:
PDF, 1.11 MB
english, 2017
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