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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Laser processing for precise fabrication of the THz optics
Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Voisiat, Bogdan, Indrišiūnas, Simonas, Šniaukas, Ramūnas, Minkevičius, Linas, Kašalynas, Irmantas, RačiukaitiVolume:
10091
Year:
2017
Language:
english
DOI:
10.1117/12.2253634
File:
PDF, 1.16 MB
english, 2017