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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 28 January 2017)] Oxide-based Materials and Devices VIII - Oxide-based materials by atomic layer deposition
Teherani, Ferechteh H., Look, David C., Rogers, David J., Godlewski, Marek, Pietruszka, Rafał, Kaszewski, Jarosław, Witkowski, Bartłomiej S., Gierałtowska, Sylwia, Wachnicki, Łukasz, Godlewski, MichałVolume:
10105
Year:
2017
Language:
english
DOI:
10.1117/12.2256017
File:
PDF, 484 KB
english, 2017