SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Improvement of three-dimensional microstructure contour accuracy using maskless lithography technique based on DMD
Jiang, Wenhan, Yang, Li, Riemer, Oltmann, Li, Shengyi, Wan, Yongjian, Huang, Shengzhou, Li, Mujun, Shen, Lianguan, Qiu, Jinfeng, Zhou, YouquanVolume:
9683
Year:
2016
Language:
english
DOI:
10.1117/12.2242366
File:
PDF, 1.40 MB
english, 2016