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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser-based Micro- and Nanoprocessing XI - Plasmonically enhanced 3D laser lithography for high-throughput nanoprecision fabrication
Klotzbach, Udo, Washio, Kunihiko, Kling, Rainer, Jonušauskas, Linas, Varapnickas, Simonas, Rimšelis, Gabrielius, Malinauskas, MangirdasVolume:
10092
Year:
2017
Language:
english
DOI:
10.1117/12.2249595
File:
PDF, 2.14 MB
english, 2017