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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - New random trigger-feature for ultrashort-pulsed laser increases throughput, accuracy and quality in micromachining applications
Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Oehler, Andreas, Ammann, Hubert, Benetti, Marco, Wassermann, Dominique, Jaeggi, Beat, Remund, Stefan, NeuenscVolume:
10091
Year:
2017
Language:
english
DOI:
10.1117/12.2252599
File:
PDF, 1.32 MB
english, 2017