Application of Al–Nb alloy film to metal capping layer on Cu
Takeyama, Mayumi B., Noya, AtsushiVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.02BC22
Date:
February, 2016
File:
PDF, 1.10 MB
english, 2016