Alleviation of parasitic reactions for III-nitride epitaxy in MOCVD with a spatial separated source delivery method by controlling the main reaction type
Yang, Haojun, Wu, Haiyan, Hu, Wei, Ma, Ziguang, Jiang, Yang, Wang, Wenxin, Jia, Haiqiang, Zhou, Junming, Chen, HongVolume:
465
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.02.033
Date:
May, 2017
File:
PDF, 1.56 MB
english, 2017