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Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering
Ali, Sharafat, Paul, Biplab, Magnusson, Roger, Broitman, Esteban, Jonson, Bo, Eklund, Per, Birch, JensVolume:
315
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.02.033
Date:
April, 2017
File:
PDF, 1.14 MB
english, 2017