Local epitaxy from the silicon substrate in silicon–rich...

Thin Solid Films 2017 / 04 Vol. 628

Local epitaxy from the silicon substrate in silicon–rich SiC during Si–nanocrystals formation

Canino, M., Balboni, R., Desalvo, A., Centurioni, E., Rizzoli, R., Bellettato, M., Summonte, C.
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Volume:
628
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.02.068
Date:
April, 2017
File:
PDF, 660 KB
english, 2017
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