Tailored Etch Profiles for Wafer-Level Frequency Tuning of...

Journal of Microelectromechanical Systems 2017 / 4 Vol. 26; Iss. 2

Tailored Etch Profiles for Wafer-Level Frequency Tuning of Axisymmetric Resonators

Behbahani, Amir H., Kim, Dennis, Stupar, Philip, DeNatale, Jeffrey, M'Closkey, Robert T.
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2667582
Date:
April, 2017
File:
PDF, 8.01 MB
english, 2017
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