Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 03 Vol. 34; Iss. 2
Structural characterization of AlGaAs:Si/GaAs (631) heterostructures as a function of As pressure
Espinosa-Vega, Leticia Ithsmel, Vidal-Borbolla, Miguel Ángel, Rodríguez-Vázquez, Ángel Gabriel, Cortes-Mestizo, Irving Eduardo, Cruz-Hernández, Esteban, Méndez-García, Víctor Hugo, Shimomura, Satoshi,Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4944452
Date:
March, 2016
File:
PDF, 1.77 MB
english, 2016