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Monte Carlo simulations of atomic layer deposition on 3D large surface area structures: Required precursor exposure for pillar- versus hole-type structures
Cremers, Véronique, Geenen, Filip, Detavernier, Christophe, Dendooven, JolienVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4968201
Date:
January, 2017
File:
PDF, 1.67 MB
english, 2017