Pressure Sensors: Nanosphere Lithography for Sub-10-nm...

Pressure Sensors: Nanosphere Lithography for Sub-10-nm Nanogap Electrodes (Adv. Electron. Mater. 1/2017)

Ji, Deyang, Li, Tao, Fuchs, Harald
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Volume:
3
Journal:
Advanced Electronic Materials
DOI:
10.1002/aelm.201770002
Date:
January, 2017
File:
PDF, 1.70 MB
2017
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