High-κ Lanthanum Zirconium Oxide Thin Film Dielectrics from...

ACS Applied Materials & Interfaces 2017 / 03 Vol. 9; Iss. 12

High-κ Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors

Woods, Keenan N., Chiang, Tsung-Han, Plassmeyer, Paul N., Kast, Matthew G., Lygo, Alexander C., Grealish, Aidan K., Boettcher, Shannon W., Page, Catherine J.
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Volume:
9
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b00915
Date:
March, 2017
File:
PDF, 879 KB
english, 2017
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