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Surface compositions of atomic layer deposited Zn 1−x Mg x O thin films studied using Auger electron spectroscopy
Xie, Ting, Romero, Danilo, Gomez, Romel D.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4922410
Date:
September, 2015
File:
PDF, 2.93 MB
english, 2015