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[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Tenth International Workshop on Stress-Induced Phenomena in Metallization - Austin (Texas) (5–7 November 2008)] AIP Conference Proceedings - Electromigration Challenges for Nanoscale Cu Wiring
Hu, C.-K., Gignac, L. M., Liniger, E., Huang, E., Greco, S., McLaughlin, P., Yang, C.-C., Demarest, J. J., Ho, Paul S., Zschech, Ehrenfried, Ogawa, ShinichiYear:
2009
Language:
english
DOI:
10.1063/1.3169265
File:
PDF, 888 KB
english, 2009