Mode transition and hysteresis in inductively coupled radio...

Physics of Plasmas 2016 / 02 Vol. 23; Iss. 2

Mode transition and hysteresis in inductively coupled radio frequency argon discharge

Wegner, Th., Küllig, C., Meichsner, J.
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Volume:
23
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4941586
Date:
February, 2016
File:
PDF, 1.07 MB
english, 2016
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