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All Regimes Parasitic Capacitances Extraction Using a Multi-Channel CBCM Technique
Zhang, Peiyong, Wan, Qing, Feng, Chenhui, Wang, HuiyanYear:
2017
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2669317
File:
PDF, 1.29 MB
english, 2017