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SPIE Proceedings [SPIE 32nd European Mask and Lithography Conference - Dresden, Germany (Tuesday 21 June 2016)] 32nd European Mask and Lithography Conference - Photonic integrated circuits: new challenges for lithography
Behringer, Uwe F.W., Finders, Jo, Bolten, Jens, Wahlbrink, Thorsten, Prinzen, Andreas, Porschatis, Caroline, Lerch, Holger, Giesecke, Anna LenaVolume:
10032
Year:
2016
Language:
english
DOI:
10.1117/12.2248325
File:
PDF, 638 KB
english, 2016