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In situ study on the thermal stability and interfaces properties of Er 2 O 3 /Al 2 O 3 /Si multi stacked films by X-ray photoelectron spectroscopy
Gao, Baolong, Mamat, Mamatrishat, Ghupur, Yasenjan, Ablat, Abduleziz, Ibrahim, Kurash, Wang, Jiaou, Liu, Chen, Zhao, JialiVolume:
104
Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2017.02.050
Date:
April, 2017
File:
PDF, 1.11 MB
english, 2017