Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Design, fabrication, and characterization of polymer-based cantilever probes for atomic force microscopes
Yu, Fangzhou, Liu, Jiangbo, Zhang, Xiao, Lin, Ai-Lian, Khan, Nabeela, Pan, Yanbiao, Gao, Nan, Zou, Qingze, Jeon, JaeseokVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4960726
Date:
November, 2016
File:
PDF, 2.68 MB
english, 2016