Mitigation of BPD by Pre-Epigrowth High Temperature Substrate Annealing
Mahadik, Nadeemullah A., Stahlbush, Robert E., Imhoff, Eugene A., Tadjer, M.J., Ruland, G.E., Affouda, C.A.Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.233
Date:
May, 2016
File:
PDF, 1.17 MB
english, 2016