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Influence of deposition pressure on properties of ZnO: Al films fabricated by RF magnetron sputtering
Liu, Chaoying, He, Feng, Yan, Ningning, Zang, Shuguang, Zuo, Yan, Ma, JuanrongVolume:
31
Language:
english
Journal:
Journal of Wuhan University of Technology-Mater. Sci. Ed.
DOI:
10.1007/s11595-016-1518-1
Date:
December, 2016
File:
PDF, 1.16 MB
english, 2016