Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams
Stachiv, Ivo, Kuo, Chih-Yun, Fang, Te-Hua, Mortet, VincentVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4947031
Date:
April, 2016
File:
PDF, 752 KB
english, 2016