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A film bulk acoustic resonator-based high-performance pressure sensor integrated with temperature control system
Zhang, Mengying, Zhao, Zhan, Du, Lidong, Fang, ZhenVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa5e6a
Date:
April, 2017
File:
PDF, 2.86 MB
english, 2017