A Microresonant Gas Sensor by Micro-Electroforming

A Microresonant Gas Sensor by Micro-Electroforming

Xu, Lizhong, Liu, Yulei
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Volume:
4
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4031740
Date:
October, 2015
File:
PDF, 1.00 MB
english, 2015
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