[IEEE 2008 Conference on Lasers and Electro-Optics (CLEO) - San Jose, CA, USA (2008.05.4-2008.05.9)] 2008 Conference on Lasers and Electro-Optics - Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition
Chen, Charlton J., Xiaodong Yang,, Husko, Chad A., Chee Wei Wong,Year:
2008
Language:
english
DOI:
10.1109/cleo.2008.4551359
File:
PDF, 301 KB
english, 2008