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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Multi-cusp ion source for Gen 5.5 doping system
Inouchi, Yutaka, Matsumoto, Takeshi, Dohi, Shojiro, Tanii, Masahiro, Takahashi, Genki, Imai, Katsuharu, Nishimura, Ippei, Tatemichi, Junichi, Konishi, Masashi, Naito, MasaoYear:
2012
Language:
english
DOI:
10.1063/1.4766555
File:
PDF, 771 KB
english, 2012