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Fabrication and characterization of a CNT forest integrated micromechanical resonator for a rarefied gas analyzer in a medium vacuum atmosphere
Sugano, Koji, Matsumoto, Ryu, Tsutsui, Ryota, Kishihara, Hiroyuki, Matsuzuka, Naoki, Yamashita, Ichiro, Uraoka, Yukiharu, Isono, YoshitadaVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/7/075010
Date:
July, 2016
File:
PDF, 2.06 MB
english, 2016