High-performance sidewall damascened tri-gate poly-si TFTs...

High-performance sidewall damascened tri-gate poly-si TFTs with the strain proximity free technique and stress memorization technique

Hsieh, Dong-Ru, Kuo, Po-Yi, Lin, Jer-Yi, Chen, Yi-Hsuan, Chang, Tien-Shun, Chao, Tien-Sheng
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Volume:
32
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/32/2/025004
Date:
February, 2017
File:
PDF, 1.30 MB
english, 2017
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