Combined effect of ion bombardment and nitrogen incorporation on structure, mechanical and optical properties of amorphous Ge 2 Sb 2 Te 5 films
Liu, Zhuan, Huang, Fei, Huang, Haihua, Zhang, Sam, Zhang, Kan, Zheng, Weitao, Hu, ChaoquanVolume:
141
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.03.013
Date:
July, 2017
File:
PDF, 2.58 MB
english, 2017