Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales
Copeland, Craig R., McGray, Craig D., Geist, Jon, Aksyuk, Vladimir A., Stavis, Samuel M.Volume:
2
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/micronano.2016.55
Date:
September, 2016
File:
PDF, 2.07 MB
english, 2016