Low power fluorine plasma effects on electrical reliability...

Chinese Physics B 2017 / 01 Vol. 26; Iss. 1

Low power fluorine plasma effects on electrical reliability of AlGaN/GaN high electron mobility transistor

Yang, Ling, Zhou, Xiao-Wei, Ma, Xiao-Hua, Lv, Ling, Cao, Yan-Rong, Zhang, Jin-Cheng, Hao, Yue
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Volume:
26
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/26/1/017304
Date:
January, 2017
File:
PDF, 455 KB
english, 2017
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