Dielectrophoresis-Assisted Integration of 1024 Carbon Nanotube Sensors into a CMOS Microsystem
Seichepine, Florent, Rothe, Jörg, Dudina, Alexandra, Hierlemann, Andreas, Frey, UrsVolume:
29
Language:
english
Journal:
Advanced Materials
DOI:
10.1002/adma.201606852
Date:
May, 2017
File:
PDF, 3.28 MB
english, 2017