Acoustic emission and precision force-displacement observations of pointed and spherical indentation of silicon and TiN film on silicon
M. Shiwa, E. Weppelmann, D. Munz, M. V. Swain, T. KishiVolume:
31
Language:
english
Pages:
7
DOI:
10.1007/bf01152149
Date:
November, 1996
File:
PDF, 1.13 MB
english, 1996