Application of ellipsometry for the accurate oxide layer...

  • Main
  • 2017 / 1
  • Application of ellipsometry for the accurate oxide layer...

Application of ellipsometry for the accurate oxide layer measurement on silicon spheres

Busch, Ingo, Liu, Wende, Chen, Chi, Luo, Zhiyong, Koenders, Ludger
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.01.125
Date:
January, 2017
File:
PDF, 898 KB
english, 2017
Conversion to is in progress
Conversion to is failed