Understanding the mechanisms of interfacial reactions...

Understanding the mechanisms of interfacial reactions during TiO 2 layer growth on RuO 2 by atomic layer deposition with O 2 plasma or H 2 O as oxygen source

Chaker, A., Szkutnik, P. D., Pointet, J., Gonon, P., Vallée, C., Bsiesy, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4960139
Date:
August, 2016
File:
PDF, 1.84 MB
english, 2016
Conversion to is in progress
Conversion to is failed