Characterization of curved surface layer by Mueller matrix...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 03 Vol. 34; Iss. 2

Characterization of curved surface layer by Mueller matrix ellipsometry

Li, Weiqi, Jiang, Hao, Zhang, Chuanwei, Chen, Xiuguo, Gu, Honggang, Liu, Shiyuan
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943952
Date:
March, 2016
File:
PDF, 2.09 MB
english, 2016
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