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AIP Conference Proceedings [Author(s) MEDICAL PHYSICS: Fourteenth Mexican Symposium on Medical Physics - México City, México (18–21 March 2016)] - Structural and electrical properties of AlN layers grown on silicon by reactive RF magnetron sputtering
Bazlov, N., Pilipenko, N., Vyvenko, O., Kotina, I., Petrov, Yu., Mikhailovskii, V., Ubyivovk, E., Zharinov, V.Volume:
1747
Year:
2016
Language:
english
DOI:
10.1063/1.4954356
File:
PDF, 1.14 MB
english, 2016