An analysis of flow, temperature, and chemical composition distortion in gas sampling through an orifice during chemical vapor deposition
Swihart, Mark T., Girshick, Steven L.Volume:
11
Language:
english
Journal:
Physics of Fluids
DOI:
10.1063/1.869954
Date:
April, 1999
File:
PDF, 6.38 MB
english, 1999